CRC Mass Airflow Sensor Cleaner works.
 

I tried some on a 2 year old MAF sensor with 60k on it after experiencing sluggishness and poor fuel economy. It took about 4 days of driving to fully re-adjust, but as of yesterday afternoon, my power and smoothness are back, as is my fuel mileage. With the abundance of MAF issues popping up among members lately, I would definitely try this $5 solution. I got mine at Autozone.