MAF cleaning does not always work. I recently cleaned mine after similar codes were triggered, but it did not help. So I replaced it. No codes, runs like a new car. You may want to replace it anyway just to rule it out. You can always throw the old one in the trunk to use as a spare to get you home in case of total MAF failure (it does happen).

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08 W251 R350
97 W210 E320
91 W124 300E
86 W126 560SEL
85 W126 380SE Silver
85 W126 380SE Cranberry
79 W123 250
78 W123 280E
75 W114 280