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I used to have an '83 300D that never had engine shake, not even after the mounts collapsed down to the frame. It was plenty noisy then, but it didn't shake.
My '81 300TD does it intermittently, in spite of having good mounts.
I'm thinking valve adjustment, then rack damper pin.
I don't think it's inherent to 5-cylinder engines. I've been in Audis that were very smooth.
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